From 1996 through 2010 EPA’s PFC Reduction/Climate Partnership for the Semiconductor Industry supported the industry’s voluntary efforts to reduce high global warming potential (GWP) greenhouse gas emissions by following a pollution prevention strategy. Partners included stakeholders in the semiconductor manufacturing industry, the Semiconductor Industry Association, and device manufacturers. The greenhouse gas emissions of primary concern for the Partnership were perfluorocarbons (PFCs), hydrofluorocarbons (HFCs), nitrogen trifluoride (NF3), and sulfur hexafluoride (SF6), collectively referred to as perfluorocompounds (PFCs) or fluorinated greenhouse gases (F-GHGs). At the end of 2010, EPA's Partners reported meeting their commitment to reduce PFC emissions 10 percent below their 1995 baseline.
- EPA's Protocol for Measuring Destruction or Removal Efficiency (DRE) of Fluorinated Greenhouse Gas Abatement Equipment in Electronics Manufacturing (PDF). (34 pp, 282K, About PDF)
- EPA's fluorinated GHG abatement device measurement studies with Partner companies; Qimonda, NEC, and IBM
- Uses and Air Emissions of Liquid PFC Heat Transfer Fluids from the Electronics Sector (PDF) (38 pp, 314K, About PDF)
- Estimating the Impact of Migration to Asian Foundry Production on Attaining the WSC 2010 PFC Reduction Goal (PDF) (16 pp, 765K, About PDF)
The following links provide more information on EPA's PFC Reduction / Climate Partnership for the Semiconductor Industry:
- Basic Information – Learn more about F-GHG emissions from semiconductor manufacturing and how EPA worked collaboratively with the global industry to reduce emissions.
- Accomplishments – Learn more about the Partnership’s successes in reducing F-GHG emissions from semiconductor manufacturing.
- Documents, Tools, and Resources – Find publications and technical tools that provide more information on F-GHG emissions measurement and reduction strategies.
- International Activities – Learn more about the World Semiconductor Council’s efforts to address global industry F-GHG emissions.
- Frequently Asked Questions – See responses to common questions about EPA’s Partnership and emissions from semiconductor manufacturing.
For further questions regarding EPA’s Partnership or GHG emissions from the semiconductor manufacturing industry, please contact Sally Rand at Rand.Sally@epa.gov or (202) 343-9739.