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Tetrachlorosilane Results

[Acute Exposure Guideline Levels (AEGLs) Program]

Tetrachlorosilane      10026-04-7     (Final)
ppm
10 min 30 min 60 min 4 hr 8 hr
AEGL 1  0.45  0.45  0.45  0.45  0.45
AEGL 2  25  11  5.5  2.8  2.8
AEGL 3  160  53  25  6.5  6.5


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