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Washes
Cleaner Technologies Substitutes Assessment (CTSA): Lithographic Blanket Washes
Appendices
Appendix A. Environmental Hazard Assessment Methodology
Appendix B. Exposure Assessment Calculations
Appendix C. Lithographic Performance Demonstration Methodology
Appendix D. Performance Demonstration Observer Sheets
Appendix E. Categorization for Lithographic Blanket Washes
Appendix F. Cost of Illness Valuation Methods
The appendices in their entirety [142 K pdf file]
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