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Photo collage of semiconductor production processes and products and the Semiconductor Partnership logo

EPA’s PFC Reduction/Climate Partnership for the Semiconductor Industry supports the industry’s voluntary efforts to reduce high global warming potential (GWP) greenhouse gas emissions by following a pollution prevention strategy. The greenhouse gas emissions of primary concern are perfluorocarbons, trifluoromethane (CHF3), nitrogen trifluoride (NF3), and sulfur hexafluoride (SF6), collectively termed perfluorocompounds (PFCs). EPA’s partners have committed to reduce PFC emissions 10 percent below their 1995 baseline by 2010.

Key Resources

The following links provide more information on the PFC Reduction / Climate Partnership for the Semiconductor Industry:

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