EPA’s PFC Reduction/Climate Partnership for the Semiconductor Industry supports the industry’s voluntary efforts to reduce high global warming potential (GWP) greenhouse gas emissions by following a pollution prevention strategy. The greenhouse gas emissions of primary concern are perfluorocarbons, trifluoromethane (CHF3), nitrogen trifluoride (NF3), and sulfur hexafluoride (SF6), collectively termed perfluorocompounds (PFCs). EPA’s partners have committed to reduce PFC emissions 10 percent below their 1995 baseline by 2010.
- EPA's Protocol for Measuring Destruction or Removal Efficiency (DRE) of Fluorinated Greenhouse Gas Abatement Equipment in Electronics Manufacturing (PDF). (34 pp, 282K, About PDF)
- EPA's fluorinated GHG abatement device measurement studies with Partner companies; Qimonda, NEC, and IBM
- Uses and Air Emissions of Liquid PFC Heat Transfer Fluids from the Electronics Sector (PDF) (38 pp, 314K, About PDF)
- Estimating the Impact of Migration to Asian Foundry Production on Attaining the WSC 2010 PFC Reduction Goal (PDF) (16 pp, 765K, About PDF)
The following links provide more information on the PFC Reduction / Climate Partnership for the Semiconductor Industry:
- Basic Information – Learn more about PFC emissions from semiconductor manufacturing and how EPA is working collaboratively with the global industry to reduce emissions.
- Accomplishments – Learn more about the partnership’s successes in reducing PFC emissions from semiconductor manufacturing.
- Partners – Meet the industry leaders manufacturing semiconductors in the U.S. that are leading the effort to reduce PFC emissions by investigating and implementing new production processes, chemicals, and emission control technologies.
- Documents, Tools, and Resources – Find publications and technical tools that provide more information on PFC emissions measurement and reduction strategies.
- International Activities – Learn more about how EPA is supporting the World Semiconductor Council’s efforts to reduce global industry PFC emissions.