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Photo collage of semiconductor production processes and products and the Semiconductor Partnership logo

From 1996 through 2010 EPA’s PFC Reduction/Climate Partnership for the Semiconductor Industry supported the industry’s voluntary efforts to reduce high global warming potential (GWP) greenhouse gas emissions by following a pollution prevention strategy. Partners included stakeholders in the semiconductor manufacturing industry, the Semiconductor Industry Association, and device manufacturers. The greenhouse gas emissions of primary concern for the Partnership were perfluorocarbons (PFCs), hydrofluorocarbons (HFCs), nitrogen trifluoride (NF3), and sulfur hexafluoride (SF6), collectively referred to as perfluorocompounds (PFCs) or fluorinated greenhouse gases (F-GHGs). At the end of 2010, EPA's Partners reported meeting their commitment to reduce PFC emissions 10 percent below their 1995 baseline.

Key Resources

The following links provide more information on EPA's PFC Reduction / Climate Partnership for the Semiconductor Industry:


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