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Technology Transfer Network - OAR Policy and Guidance

OAR Policy and Guidance Metarecord

Document Title/Subject:
Semiconductor Manufacturing: Air Toxics Rule: Proposed Rule
Related Documents:
Signed by: Administrator Christine Todd Whitman

Signature Date: 05/01/02

Contact:
John Schaefer
919 541-0296

Filename(s):
http://www.epa.gov/ttn/oarpg/t3/fr_notices/smatr_pr.pdf
URL(s):

 

Regulatory Authority:
Title 3
Division/Director:
Emission Standards Division (OAQPS) / Sally Shaver
Submitted By:
schaefer.john
OGC Contact:
Paul Cort
OGC Phone#:
202 564-5573
Internet Contact:
Jeff Clark
Document Type:
Proposed & Final Preambles & Rules,
EPA Document Number:

Federal Register:
Supersedes:
Subject Category:
AIR
Keywords:
Electronics and computer industry
Hazardous air pollutants
HAPs
Maximum Achievable Control Technology Emission Standards
MACTs

Semiconductors Wafer Fabrication
Terms:
Air pollutants
Clean Air Act
CAA
Abstract:
The EPA is proposing NESHAP for Semiconductor Manufacturing requiring maximum achievable control technology (MACT) for all semiconductor manufacturing facilities that are major sources of hazardous air pollutants.

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