OAR Policy and Guidance Metarecord

Document Title/Subject: Semiconductor Manufacturing: Air Toxics Rule: Background Information Related Documents:	Signed by: Signature Date: Contact: John Schaefer 919 541-0296	Filename(s): http://www.epa.gov/ttn/oarpg/t3/reports/smatr_bid.pdf URL(s):
Regulatory Authority: Title 3	Division/Director: Emission Standards Division (OAQPS) / Sally Shaver	Submitted By: schaefer.john	OGC Contact: Paul Cort OGC Phone#: 202 564-5573	Internet Contact: Jeff Clark
Document Type: Background Information Documents,	EPA Document Number: Federal Register:	Supersedes:
Subject Category: AIR	Keywords: Electronics and computer industry Hazardous air pollutants HAPs Maximum Achievable Control Technology Emission Standards MACTs Semiconductors Wafer Fabrication	Terms: Air pollutants Clean Air Act CAA
Abstract: This document provides background information on the proposed NESHAP Semiconductor Manufacturing.