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OAR Policy and Guidance Metarecord

Document Title/Subject:
Semiconductor Manufacturing: Air Toxics Rule: Fact Sheet
Related Documents:
Signed by:

Signature Date:

Contact:
John Schaefer
919 541-0296

Filename(s):
http://www.epa.gov/ttn/oarpg/t3/fact_sheets/smatr_fs.pdf

URL(s):

 

Regulatory Authority:
Title 3
Division/Director:
Emission Standards Division (OAQPS) / Sally Shaver
Submitted By:
schaefer.john
OGC Contact:
Paul Cort
OGC Phone#:
202 564-5573
Internet Contact:
Jeff Clark
Document Type:
Fact Sheets,
EPA Document Number:

Federal Register:
Supersedes:
Subject Category:
AIR
Keywords:
Electronics and computer industry
Hazardous air pollutants
HAPs
Maximum Achievable Control Technology Emission Standards
MACTs

Semiconductors Wafer Fabrication
Terms:
Air pollutants
Clean Air Act
CAA
Abstract:
The attached fact sheet provides information on the proposed NESHAP for Semiconductor Manufacturing.

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