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Tetrachlorosilane Results - AEGL Program

Tetrachlorosilane 10026-04-7 (Final)
	10 min	30 min	60 min	4 hr	8 hr
ppm
AEGL 1	0.45	0.45	0.45	0.45	0.45
AEGL 2	25	11	5.5	2.8	2.8
AEGL 3	160	53	25	6.5	6.5

Chlorosilanes AEGL Technical Support Document (pdf) (560.09 KB)

Tetrachlorosilane Results - AEGL Program

Acute Exposure Guideline Levels