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Trichlorosilane Results - AEGL Program

Trichlorosilane 10025-78-2 (Final)
	10 min	30 min	60 min	4 hr	8 hr
ppm
AEGL 1	0.60	0.60	0.60	0.60	0.60
AEGL 2	33	14	7.3	3.7	3.7
AEGL 3	210	70	33	8.7	8.7

Chlorosilanes AEGL Technical Support Document (pdf) (560.09 KB)

Trichlorosilane Results - AEGL Program

Acute Exposure Guideline Levels